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Silicon trichloride
[CAS# 19165-34-5]

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Identification
Name Silicon trichloride
Synonyms Silicon chloride; Silicon trichloride radical; Trichlorosilyl; Trichlorosilyl radical
Molecular Structure CAS # 19165-34-5, Silicon trichloride, Silicon chloride, Silicon trichloride radical, Trichlorosilyl, Trichlorosilyl radical
Molecular Formula SiCl3
Molecular Weight 134.44
CAS Registry Number 19165-34-5
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