Tetrafluorosilane
[CAS# 7783-61-1]

Identification

• Classification: Chemical reagent >> Silane reagent
• Name: Tetrafluorosilane
• Synonyms: Perfluorosilane; Silicon fluoride; Silicon tetrafluoride
• Molecular Formula: SiF₄
• Molecular Weight: 104.08
• CAS Registry Number: 7783-61-1
• EC Number: 232-015-5

Properties

• Solubility: Slightly soluble (1.2 g/L) (25 ºC), Calc.^*
• Density: 1.660 g/cm³ (-95 ºC)^**
• Melting point: -77 ºC^***
• Boiling point: -65 ºC^***

^* Calculated using Advanced Chemistry Development (ACD/Labs) Software V11.02 (©1994-2017 ACD/Labs)

^** "Metal-Organics Catalog" physical property data were obtained from Gelest, Inc. of Morrisville, Pennsylvania (US)

^*** Moissan, H.; Comptes Rendus Hebdomadaires des Seances de l'Academie des Sciences 1904, V139, P711.

Safety Data

Hazard Classification

Hazard	Class	Category Code	Hazard Statement
Acute toxicity	Acute Tox.	2	H330
Skin corrosion	Skin Corr.	1A	H314
Gases under pressure (liquid)	Press. Gas (Liq.)		H280
Acute toxicity	Acute Tox.	2	H300
Acute toxicity	Acute Tox.	2	H310
Skin corrosion	Skin Corr.	1B	H314
Acute toxicity	Acute Tox.	3	H331
Serious eye damage	Eye Dam.	1	H318
Reproductive toxicity	Lact.	-	H362
Acute toxicity	Acute Tox.	1	H310
Acute toxicity	Acute Tox.	1	H330
Gases under pressure (compressed)	Press. Gas (Comp.)		H280