Trichlorosilane (CAS 10025-78-2) Market Research Report 2026 '@aboutTrichlorosilane (Trichlorosilyl, Silicochloroform, Silane, trichloro-, Trichloromonosilane, silane, trichloro) is an inorganic compound with the molecular formula HSiCl3. Trichlorosilane is a colorless volatile liquid with an acrid smell of hydrogen ...